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专利概况
专利名称 Tunable UV LASER GENERATOR FOR ULTRA HIGH RESOLUTION MICROSCOPE LIGHT SOURCE AND GENERATING METHOD THEREOF
申请号 KR1020150104898 申请日
公开(公告)号 KR1020170011731A 公开(公告)日
申请(专利权)人 KOREA BASIC SCIENCE INSTITUTE 发明人 KIM SEUNG HYUN; KIM GEON HEE; HUR HWAN; LEE KYE SUNG
专利来源 国家知识产权局 转化方式
摘要

The purpose of the present invention is to provide a UV laser generating device capable of generating a laser with a wavelength of 200 nm or shorter, varying the wavelength thereof, having stable high-powered light emitting properties and a laser generating method thereof to provide super high resolution in hundred-nanometer class for an industrial microscope. The UV laser generating device of the present invention includes : an L-shaped vacuum chamber (100) having a pumping light input unit (110), a light output unit (120), a gas inlet (130), and a gas outlet (140); a first lens (210) inserted into the pumping light input unit (110); a filter (300) provided to the rear of a first lens (220) inserted into the pumping light input unit (110), a second lens (220) inserted into the light output unit (120), and on a rear end of the second lens; and a driving unit (500) including a source holder (400) wherein a metallic source is supported, a motor (510), and a driving shaft (520).COPYRIGHT KIPO 2017

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