专利名称 | Tunable UV LASER GENERATOR FOR ULTRA HIGH RESOLUTION MICROSCOPE LIGHT SOURCE AND GENERATING METHOD THEREOF | ||
申请号 | KR1020150104898 | 申请日 | |
公开(公告)号 | KR1020170011731A | 公开(公告)日 | |
申请(专利权)人 | KOREA BASIC SCIENCE INSTITUTE | 发明人 | KIM SEUNG HYUN; KIM GEON HEE; HUR HWAN; LEE KYE SUNG |
专利来源 | 国家知识产权局 | 转化方式 | |
摘要 |
The purpose of the present invention is to provide a UV laser generating device capable of generating a laser with a wavelength of 200 nm or shorter, varying the wavelength thereof, having stable high-powered light emitting properties and a laser generating method thereof to provide super high resolution in hundred-nanometer class for an industrial microscope. The UV laser generating device of the present invention includes : an L-shaped vacuum chamber (100) having a pumping light input unit (110), a light output unit (120), a gas inlet (130), and a gas outlet (140); a first lens (210) inserted into the pumping light input unit (110); a filter (300) provided to the rear of a first lens (220) inserted into the pumping light input unit (110), a second lens (220) inserted into the light output unit (120), and on a rear end of the second lens; and a driving unit (500) including a source holder (400) wherein a metallic source is supported, a motor (510), and a driving shaft (520).COPYRIGHT KIPO 2017 |
主管部门:海南中小企业服务 | 建设单位:海南商业联合会
版权所有:海南商业联合会 | 备案号:粤ICP备13083911号(ICP加挂服务)@2017