Provided by the present invention are a gas flow regulation apparatus and a mass flow controller, the gas flow regulation apparatus comprising : a valve port component, a first gas intake channel being disposed in the valve port component; a push rod component, a first through hole being disposed in the push rod component, and a push rod being disposed in the first through hole, a first end surface of the push rod being opposite to a gas discharge end of the first gas intake channel, and the push rod being elastically connected to the push rod component by means of an elastic diaphragm; a driving assembly is used to drive the push rod to move in a direction approaching or moving away from the first gas intake channel, such that the first end surface of the push rod comes into contact and seals with or separates from the gas discharge end of the first gas intake channel. The gas flow regulation apparatus provided by the present invention may not only have a simplified structure and reduce the number of parts that come into contact with gas, but may also prevent malfunctions that arise from reed failure.